Abstract: Semiconductor physics is recognized as one of themajor areas of condensed matter physics and the core of modern micro-electronics device technology. The research to investigate the laws of development ofsemiconductor physics is significant for finding the development trend of semiconductor science and technology in future. In this paper, we have reviewed theinvention of transistor, the development of semiconductor superlattice physics, the progress of research on nano quantum devices, and looked forward to thedevelopment prospect of new semiconductor nano materials. Based on the development process of semiconductor physics, we have analyzed the laws andcharacteristics of development of semiconductor physics.